Technical Papers
To obtain copies of the papers below, please see the contact information for each organization as listed. There may be a charge for each paper.
Rubber Division ACS
P.O. Box 499
Akron, OH 44309-0449 USA
Tel: 330-972-7814
Society of Automotive Engineers (SAE)
400 Commonwealth Drive
Warrendale, PA 15096-0001 USA
Tel: 001 412 776 4841
Outgassing Characterization of Elastomeric Seals
By Mark J. Heller, Shinichi Sogo, Joe Chen and John Legare
This paper compares the outgassing characteristics of three different types of elastomeric seals (perfluoroelastomers, fluoroelastomers and silicones) typically used in semiconductor wafer processing. While perfluoroelastomers as a material class exhibit the lowest outgassing rate at elevated temperatures,
there are some performance variations depending on formulation and compounding.
Click here for full paper. |
56th International AVS Symposium and Exhibition, November 2009, San Jose, CA
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Improved Flex Properties For Peroxide Cured AEM Compounds
By Ed McBride
For copies of this paper, contact ACS Rubber Division
Click here for Abstract. |
176th ACS Rubber Show, October 2009, Pittsburgh, PA
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Perfluoroelastomer and Fluoroelastomer Seals for Photovoltaic Cell Manufacturing Processes
By Dr. Michele Vigliotti, Dr. Shuhong Wang, Joe Chen and John M. Legare
Click here for full paper. |
5th SMET Advanced PV Technology Conference, Munich, Germany, May 2009
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Fluoroelastomers Compatibility with Bioalcohol Fuels
By Eric Thomas
Click here for Abstract. |
SAE World Congress, Detroit, Michigan, April, 2009
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