Choose Kalrez® For Aggressive Semiconductor Processing Environments

The success of Kalrez® perfluoroelastomer parts have been field-proven in the manufacture of semiconductors, where processing steps can involve extremes of both thermal and chemical exposure. Since purity is critical to high semiconductor wafer yield, reducing contamination from particulates, outgassing and extractables caused by seal deterioration is a major goal of semiconductor fabricators. With Kalrez®, manufacturers gain seal integrity and process purity that is backed by more than a quarter century of success.

Chemical resistance that is nearly universal, coupled with superior high-temperature properties, enables Kalrez® parts to withstand virtually any process media, including plasma with various gases at temperatures up to 325°C.

By selecting the product for Kalrez® parts that is best suited to a specific application, processors can improve Semiconductor Seal performance in all wafer-fabricating operations, including thermal, deposition, etching, ashing/stripping, and wet chemical processes. All Kalrez® parts for semiconductor applications are UltraPure post-cleaned and packaged in a Class 100 clean room for reduced contamination. Click on our semiconductor brochure at right for more information.

Process Environment Kalrez® 9100 Kalrez® Sahara™ 8002 Kalrez® Sahara™ 8085 Kalrez® 8900 Kalrez® Sahara™ 8475 Kalrez® 6375UP HDPCVD/PECVD +++ + + Etching +++ + + Ashing/Stripping + +++ + SACVD + + Thermal +++ + Wet +++

+++ Suggested Product
+ Application Dependent - Consult your DPE Representative regarding appropriate product selection

Users of Kalrez® have the assurance of quality and traceability of all parts made at the company's ISO 9001/9002 and AS 9100-registered facilities in the U.S. and Japan. No other high performance seal manufacturer offers this total control over product quality and end-use applications.